Production and Characteristics of Microreators Made of Glass
(0.75MB
Acrobat Reader Required)
02/01/05
By Thomas R. Dietrich, Andreas Freitag and Ralf Scholz
A
New 3D, Direct-Write, Sub-Micron Microfabrication Process that Achieves
True Optical, Mechatronic and Packaging Integration on Glass-Ceramic
Substrates (1.6MB
Acrobat Reader Required)
04/01/03
By Raymond M. Karam and Richard J. Casler, Invenios, Inc.
The 2D MEMS processes today provide limited capability to achieve
true 3D functionality. In addition, integration of the MEMS into
functioning systems is difficult and often represents over 80% of
the cost of the final packaged solution. Finally, the batch nature
of the process, while efficient from a production efficiency standpoint,
introduces significant time and tooling investment to get functioning
product. In this paper we describe a true sub-micron, 3D micro-fabrication
process that represents a paradigm shift toward "rapid production"
of integrated solutions for a broad range of applications including
micro-replication, micro-robotics, MOEMS and microfluidics.
