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3D Scratch-proof Masks and Gratings
3D Micro-Molds
3D Micro-Machined Glass Components
3D Micro-Machined Ceramic Components

Micro Fabrication Technology

Invenios has built a state-of-the-art laser machining foundry dedicated to true 3D microfabrication of glass-ceramic structures and to planar machining of metal substrates. The technology can be applied to square or rectangular substrates ranging in size from 100 mm square to 150 mm square and ranging in thickness from 0.2 mm to 11 mm.

Micromachining of Photostructurable Glass-Ceramics

In March, 2003, Invenios acquired exclusive rights from a Federally-Funded Research and Development Center (FFRDC) to commercialize and market a true 3D, microfabrication/MEMS process technology. Developed primarily for the creation of passive and active glass-ceramic substrates for use in the manufacture of picosatellites and other aerospace structures, the non-ablative, direct-write laser patterning process now being deployed by the Invenios, can create complex 3D components and machines, employing embedded channels and micromachines with aspect ratios in excess of 30:1. These components can be processed in the amorphous glass state or fully converted to ceramic (crystalline). To learn more about the technology, including material properties, download our white paper (1.5MB Acrobat Reader Required).

The technology leverages the unique properties of the photo-structurable, aluminosilicate glass-ceramic substrate material-properties that make it ideal for integration of optic, mechatronic, and packaging functionality. When combined with the flexible, rapid prototyping/production capacity derived from the direct-write patterning process the technology can be applied to the design and manufacture of a broad range of microsystems, including those in microfluidic, photonic, microreplication, microsensor and microrobotic applications. Parts can be manufactured from solid models supplied by the customer.

Invenios is working with select customers in the following areas:

3D Scratch-proof Masks and Gratings

  Position Transducers
  MEMS Masks
   

3D Micro-Molds

  Microfluidics
   

3D Micro-Machined Glass Components

  Wafer-scale Packaging (Solid State Imagers)
  Microfluidics
   

3D Micro-Machined Ceramic Components

  Optical/Photonics
  Wafer Probe Card
  Thin Film Material Handling
  X-ray Collimation

Manufacturing

Invenios is a manufacturer of precision linear and rotary stages, anthropomorphic platforms and true 3D dynamic MEMS contract manufacturing; serving a broad range of traditional and emerging micromanufacturing applications-all with one thing in common…they require fast, dependable, nanoscale precision of alignment and assembly in the smallest possible footprint.

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