Micro Fabrication Technology
Invenios has built a state-of-the-art
laser machining foundry dedicated to true 3D microfabrication
of glass-ceramic structures and to planar machining of metal
substrates. The technology can be applied to square or
rectangular substrates ranging in size from 100 mm square to
150 mm square and ranging in thickness from 0.2 mm to 11 mm.
Micromachining of Photostructurable Glass-Ceramics
In March, 2003, Invenios acquired exclusive rights from a
Federally-Funded Research and Development Center (FFRDC) to
commercialize and market a true 3D, microfabrication/MEMS
process technology. Developed primarily for the creation of
passive and active glass-ceramic substrates for use in the
manufacture of picosatellites and other aerospace structures,
the non-ablative, direct-write laser patterning process now
being deployed by the Invenios, can create complex 3D
components and machines, employing embedded channels and
micromachines with aspect ratios in excess of 30:1. These
components can be processed in the amorphous glass state or
fully converted to ceramic (crystalline). To learn more about
the technology, including material properties, download our
white paper (1.5MB Acrobat Reader Required).
The technology leverages the unique properties of the photo-structurable,
aluminosilicate glass-ceramic substrate material-properties
that make it ideal for integration of optic,
mechatronic, and packaging functionality. When
combined with the flexible, rapid prototyping/production
capacity derived from the direct-write patterning process the
technology can be applied to the design and manufacture of a
broad range of microsystems, including those in microfluidic,
photonic, microreplication, microsensor and microrobotic
applications. Parts can be manufactured from
solid
models supplied by the customer.
Invenios is working with select customers in the following
areas:
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3D Scratch-proof Masks and Gratings
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Position Transducers |
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MEMS Masks |
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3D Micro-Molds |
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Microfluidics |
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3D Micro-Machined Glass Components |
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Wafer-scale Packaging
(Solid State Imagers) |
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Microfluidics |
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3D Micro-Machined Ceramic Components |
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Optical/Photonics |
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Wafer Probe Card |
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Thin Film Material
Handling |
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X-ray Collimation |
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Manufacturing
Invenios is a manufacturer of precision linear and rotary
stages, anthropomorphic platforms and true 3D dynamic MEMS
contract manufacturing; serving a broad range of traditional
and emerging micromanufacturing applications-all with one
thing in common…they require fast, dependable, nanoscale precision
of alignment and assembly in the smallest possible footprint.
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