System Components and Product Index
Invenios
produces a broad line of
specialized precision positioning systems that help system integrators
drive production throughput at unprecedented yields. Unlike
most nanopositioner manufacturers that sacrifice stiffness for
resolution, the Invenios suite of high-stiffness precision linear
and rotary stages, and anthropomorphic platforms eliminate redundant
process steps and deliver a measurably higher production yield
in a wide range of sub-micron alignment and assembly applications.
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Positioning
Components
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| Travel,
mm |
30,
100, 150 |
| Resolution,
nm |
33
(Nano)
01 (Nano-XP) |
| Load,
N |
20 |
| Speed,
mm/sec |
25 |
Flatness,
µm |
±
0.5 |
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InvenioStage-Nano,
-NanoXP
(30, 100, 150mm) Precision Ball Screw Series
InvenioStage-Nano and InvenioStage-NanoXP
of scalable precision ball-screw stages meet demanding positioning
requirements in applications employing short (30mm) to medium
(150mm) travel. The Nano series employs patented bearing technology
that achieves sub-micron out-of-plane motion required in the
most demanding applications and delivers on-axis resolution
of 30 nm. The InvenioStage-NanoXP option employs a precision
scale that measures directly the stage translation enabling
1nm resolution. |
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| Travel,
µm |
25
- 500 |
| Resolution |
12 or 16
bit of full travel |
| Load,
N |
3.3 |
| Axes |
1, 2 |
| Speed,
mm/sec |
375 |
| Feedback |
Eddy Current |
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InvenioFlex X-Y
(25-500 micron), Rotary 1-25 Degrees
InvenioFlex-Series of dual-axis, piezo-driven flexures achieves
extended range of motion-scalable from 25 to 500 µm with
16 bit dynamic range in an industrially-hardened package. |
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| Travel,
mm |
10 |
| Flatness |
10 nm over
10mm |
| Load,
N |
1
N |
| Axes |
1 |
| Max
Speed, mm/sec |
1 |
| Min Speed,
µm/sec |
3 |
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InvenioRef
InvenioRef-Series of reference stages achieves a flatness of
motion of 10nm over 10 mm, meeting the needs of atomic force
microscopes and positioning systems that require extended range
of motion with tight out-of-plane error tolerances. |
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Assembly
Platforms
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| Linear
Travel, mm |
±
15 mm in x-y (plane parallel to base plane. +10/--13 in
z |
| Angular
Travel, degrees |
±
15 in tip/tilt (rx, ry) ± 10 rz |
| Resolution,
nm/ µrad |
33/
0.235 |
| Load,
kg |
4
centered on origin (x=0, y=0), 1 @ 150 mm offset from
z-axis |
| Axes |
6 |
| Linear
Speed, mm/sec |
25
in x-y, 17 in z |
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Angular Speed, rad/sec |
0.17 |
| Linear
Flatness |
±
1 µm |
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Angular Flatness |
±
0.5 µrad |
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Mounting |
Vertical,
Inverted, Side |
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InvenioSix
InvenioSix is a six degree-of-freedom anthropomorphic robot
that delivers sub-micron repeatability (100 nm/2 µrad)
with extended range of motion (50 µm/ +/-100 µrad)
meeting the needs of precision alignment applications commonly
found in the telecommunications and consumer electronics arenas.
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| Travel,
mm |
30,
100, 150 |
| Resolution,
nm |
33
(Nano)
01 (Nano-XP) |
| Load,
N |
20 |
| Speed,
mm/sec |
25 |
Flatness,
µm |
±
0.5 |
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InvenioStage-based Cartesian
Nanopositioner
Invenios' Cartesian Platforms integrate multiple InvenioStage-Nano,
InvenioStage-LC, and InvenioLinear components to deliver high-performance
in a space-efficient footprint. Typical configurations include
XY, YZ, and XYZ topologies. |
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XYZ Configuration
(100 mm X 28 mm X 28 mm)
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XZ Configuration
(100 mm X 28 mm)
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Extended XYZ Configuration
(100 mm X 100 mm X 28 mm)
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T-Conf.jpg) |
See InvenioStage
and InvenioFlex specifications
to determine the
performance of your
built-to-order configuration. |
Industrially-Hardened Hybrid
Platforms-InvenioStage/InvenioFlex
Invenios' Cartesian Platforms with Integrated InvenioFlex integrate
precision InvenioFlex technology with InvenioStage and InvenioLinear
stages to achieve high-bandwidth nanoscale resolution with extended
range of motion-all in the world's smallest footprint. Typical
configurations include Z-xy, XYZ-xy, (Z-xy)-xy-(Z-xy)T.
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(Z-xy)-xy-(Z-xy)T
Configuration
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Z-xy Configuration
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